Showing results 4 to 5 of 5
Issue Date | Title | Author(s) |
---|---|---|
2018-08 | High-Efficiency Output Pressure Performance Using Capacitive Micromachined Ultrasonic Transducers with Substrate-Embedded Springs | Lee, Byung Chul; Nikoozadeh, Amin; Park, Kwan Kyu; Khuri-Yakub, Butrus T. |
2020-09 | Wafer-scale Fabrication of Nanometer Silicon Posts for Capacitive Micromachined Ultrasonic Transducers with Substrate-Embedded Springs | Kim, Hae Youn; Kang, Dong-Hyun; Lee, Byung Chul; Khuri-Yakub, Butrus T.; Kim, Jinsik |