Showing results 6 to 7 of 7
Issue Date | Title | Author(s) |
---|---|---|
1998-12 | RuO2/Ru electrode on Si3N4/Si substrate for microelectromechanical systems devices based on Pb(Zr1-xTix)O-3 film and surface micromachining | Yoon, YS; Kim, JH; Schmidt, AM; Polla, DL; Wang, Q; Gladfelter, WL; Shin, YH |
2000-03-15 | Simulation and fabrication of piezoresistive membrane type MEMS strain sensors | Cao, L; Kim, TS; Mantell, SC; Polla, DL |