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Browsing byAuthorBaik, Y. -J.

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Issue DateTitleAuthor(s)
2013-05-25The parameter space of hydrogen content added to Ar-nitrogen sputtering gas and substrate bias voltage for the formation of cubic boron nitride thin film deposited by unbalanced magnetron sputtering methodKo, J. -S.; Park, J. -K.; Lee, W. -S.; Baik, Y. -J.
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