Showing results 4 to 5 of 5
Issue Date | Title | Author(s) |
---|---|---|
2002-08-01 | The effect of plasma exposure and annealing atmosphere on shallow junction formation using plasma source ion implantation | Cho, J; Han, S; Lee, Y; Kim, OK; Kim, GH; Kim, YW; Lim, H |
2001-02-02 | The measurement of nitrogen ion species ratio in inductively coupled plasma source ion implantation | Cho, J; Han, S; Lee, Y; Kim, OK; Kim, GH; Kim, YW; Lim, H; Suh, M |