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Showing results 1 to 3 of 3

Issue DateTitleAuthor(s)
2013-01-25Effect of hydrogen addition on the residual stress of B-C-N films with cubic boron nitride phase prepared by r.f. magnetron sputtering of a B4C targetPark, Jong-Keuk; Ko, Ji-Sun; Baik, Young-Joon
2013-12-31Effect of substrate bias and hydrogen addition on the residual stress of BCN film with hexagonal structure prepared by sputtering of a B4C target with Ar/N-2 reactive gasPark, Jong-Keuk; Lee, Jung-Hun; Lee, Wook-Seong; Baik, Young-Joon
2011-09-01Variation of residual stress in cubic boron nitride film caused by hydrogen addition during unbalanced magnetron sputteringKim, H-S.; Park, J-K.; Lee, W-S.; Baik, Y-J.
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