Browsing bySubjectIn situ electron beam lithography

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Issue DateTitleAuthor(s)
2018-04Deterministic Integration of Quantum Dots into on-Chip Multimode Interference Beamsplitters Using in Situ Electron Beam LithographySchnauber, Peter; Schall, Johannes; Bounouar, Samir; Hoehne, Theresa; Park, Suk-In; Ryu, Geun-Hwan; Heindel, Tobias; Burger, Sven; Song, Jin-Dong; Rodt, Sven; Reitzenstein, Stephan

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