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Showing results 1 to 3 of 3

Issue DateTitleAuthor(s)
1993-03-01INTERFACIAL OXIDE-GROWTH AND FILLING-UP BEHAVIOR OF THE MICRO-GAP IN SILICON FUSION BONDING PROCESSESJU, BK; OH, MH; TCHAH, KH
1992-01Observation of oxide film formed at Si-Si bonding interface in SFB process주병권; 오명환; 차균현
1995-02ON THE ANISOTROPICALLY ETCHED BONDING INTERFACE OF DIRECTLY BONDED (100) SILICON-WAFER PAIRSJU, BK; LEE, YH; TCHAH, KH; OH, MH
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