Browsing by Author A. M. Schimidt

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Issue DateTitleAuthor(s)
1999-01RuO2/Ru electrode on Si3N4/Si substrate for microelectromechanical systems devices based on Pb(Zr1-xTix)O3 film and surface micromachining윤영수; 김준한; A. M. Schimidt, et al