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Showing results 1 to 2 of 2

Issue DateTitleAuthor(s)
2001-07Dry etching of SrBi2Ta2O9 thin films in Cl-2/NF3/O-2/Ar inductively coupled plasmasIm, YH; Park, JS; Choi, CS; Choi, RJ; Hahn, YB; Lee, SH; Lee, JK
2001-02Plasma chemistries for dry etching of SrBi2Ta2O9 thin filmsPark, JS; Im, YH; Choi, RJ; Hahn, YB; Choi, CS; Lee, SH; Lee, JK
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