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Issue DateTitleAuthor(s)
2020-10Tunable Dielectric and Thermal Properties of Oxide Dielectrics via Substrate Biasing in Plasma-Enhanced Atomic Layer DepositionKim, Yoonjin; Kwon, Heungdong; Han, Hyun Soo; Kim, Hyo Jin K.; Kim, Brian S. Y.; Lee, Byung Chul; Lee, Joohyun; Asheghi, Mehdi; Prinz, Fritz B.; Goodson, Kenneth E.; Lim, Jongwoo; Sim, Uk; Park, Woosung
1

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