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Showing results 25 to 27 of 27

Issue DateTitleAuthor(s)
2002-08-01The effect of plasma exposure and annealing atmosphere on shallow junction formation using plasma source ion implantationCho, J; Han, S; Lee, Y; Kim, OK; Kim, GH; Kim, YW; Lim, H
2001-02-02The measurement of nitrogen ion species ratio in inductively coupled plasma source ion implantationCho, J; Han, S; Lee, Y; Kim, OK; Kim, GH; Kim, YW; Lim, H; Suh, M
1998-12Thin film growth and surface modification by keV ion beamChoi, SC; Park, YW; Choi, WK; Kim, KH; Cho, JS; Han, S; Cho, J; Jung, S; Han, YG; Yoo, BK; Jung, HJ; Koh, SK
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