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Showing results 3 to 4 of 4

Issue DateTitleAuthor(s)
-Characteristics of the Coherent EUV Light Source for EUV MetrologyKim Yong Soo; Kim Younghee; Park June; Hamin Sung; Jomsool Kim; Ju Han Lee; Jhon, Young Min
-Optimization of High Harmonic Generation of Coherent EUV Light for EUV Metrology: Simulations and ExperimentsJung Min Ki; Yong Soo Kim; Kim Younghee; Kim, Yong Tae; Hamin Sung; Jomsool Kim; Ju Han Lee; Jhon, Young Min
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