Showing results 2 to 2 of 2
Issue Date | Title | Author(s) |
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- | Optimization of High Harmonic Generation of Coherent EUV Light for EUV Metrology: Simulations and Experiments | Jung Min Ki; Yong Soo Kim; Kim Younghee; Kim, Yong Tae; Hamin Sung; Jomsool Kim; Ju Han Lee; Jhon, Young Min |