Showing results 4 to 4 of 4
Issue Date | Title | Author(s) |
---|---|---|
1994-10 | Formation of silicon diaphragm using silicon-wafer direct bonding / electrochemical etch-stopping and its application to silicon pressure sensor fabrication | 주병권; 하병주; 김근섭; 송만호; 김성환; 김철주; 차균현; 오명환 |