2000-04 | A new type thin film bulk acoustic resonator(TFR) using surface micromachining technique | 김현호; 이시형; 주병권, et al |
2001-04 | A noble suspended type thin film resonator (STFR) using the SOI technology | 김현호; 주병권; 이윤희, et al |
2005-08 | A novel ultrafine particle measurement system with an electrometer | 박상수; 이창진; 김수원, et al |
2000-11 | AIN 압전체를 이용한 suspended 압전박막공진기의 제조 | 주병권; 김현호; 이시형, et al |
2005-01 | Air-gap type film bulk acoustic resonator using flexible thin substrate | 강유리; 강성철; 백경갑, et al |
2008-05 | Bias-heating recovery of MWCNT gas sensor | 문승일; 백경갑; 이윤희, et al |
2003-12 | Design and Fabrication of Film Bulk Acoustic Resonator for Flexible Microsystems | 강유리; 김용국; 김수원, et al |
2001-06 | Fabrication and characterization of suspended-type thin film resonator using SOI-micromachining process | 주병권; 김현호; 이시형, et al |
2000-07 | Fabrication and silmulation results of spiral inductors using the micromachining technology | 김현호; 주병권; 이전국, et al |
2003-05 | Fabrication of flexible FBAR using thin silicon wafer. | 김용국; 배용환; 강유리, et al |
2004-02 | Fabrication of suspended thin film resonator for application of RF bandpass filter | 김현호; 주병권; 이윤희, et al |
2006-08 | Multiwall carbon nanotube sensor for monitoring engine oil degradation | 문승일; 백경갑; 이윤희, et al |
2000-11 | The fabrication of the suspended thin film resonator(STFR) using AlN piezoelectric | 김현호; 이시형; 이전국, et al |
2006-09 | Ultrathin silicon micropackaging for RF MEMS devices | 김용국; 박윤권; 김재경, et al |