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Showing results 1 to 8 of 8

Issue DateTitleAuthor(s)
-CD Measurements of EUV Mask using a Coherent Scattering Microscope Mask Inspection ToolKim Yong Soo; Park June; 성하민; 김점술; 이승범; 조현우; Park, Min-Chul; Cho, Woon Jo; Kim, Yong Tae; 이주한; Jhon, Young Min
-Characteristic Analysis of Coherent EUV Light Source based on High-order Harmonic GenerationKim Yong Soo; Park June; Kim Younghee; 성하민; 김점술; 이승범; 조현우; Cho, Woon Jo; Kim, Yong Tae; 이주한; Jhon, Young Min
-Coherent EUV Light Source using a Gas Capillary based on High-order Harmonic GenerationPark Han Young; Kim Yong Soo; 성하민; 김점술; 이주한; Jhon, Young Min
-CSM(Coherent Scattering Microscope) system development for next generation EUV photomask inspection박한용; 김용수; 성하민; 김점술; 이승범; 조현우; 이주한; Kim, Yong Tae; Jhon, Young Min
-Design and Construction of an EUV Grating Spectrometer for the High Harmonic Generation at 13.5 nm김점술; 함용희; 정재룡; 권승호; Sung Hamin; Kim Yong Soo; Jhon, Young Min
-Development of a Coherent EUV Light Source for EUV Mask InspectionKim Yong Soo; Ahn Joonmo; 성하민; Cho, Woon Jo; Park, Min-Chul; 김점술; KIM, JAE HUN; Woo, Deok Ha; Lee, Seok; Ju Han LEE; Kim, Yong Tae; Jhon, Young Min
-Development of Coherent EUV Light Source for EUV MetrologySung Hamin; Kim Yong Soo; Cho, Woon Jo; Park, Min-Chul; 함용희; 김점술; KIM, JAE HUN; Woo, Deok Ha; Lee, Seok; 이주한; Kim, Yong Tae; Jhon, Young Min
-(Undefined)박한용; 김용수; 김영희; 성하민; 김점술; 이주한; Park, Min-Chul; Jhon, Young Min
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