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Showing results 13 to 16 of 16

Issue DateTitleAuthor(s)
-Improvement in diffusion barrier properties of PECVD W-N thin film by low energy BF2+ implantation김동준; Kim Yong Tae; PARK YOUNG KYUN; 심현상; 박종완
-Improvement in the characteristics of ammonia plasma treated MSQ(Methyl Silsesquioxane)심현상; 김동준; KIM CHUN KEUN; Kim Seong Il; Kim Yong Tae; 전형탁
-Structural and micromechanical characteristics of low-dielectric organosilicate thin films modified by NH₃ plasma treatment차국헌; 주상현; 김수한; 심현상; Kim Yong Tae; 한진희; 이진규; 윤도영
2004-10-26펄스 플라즈마 방전에 의한 박막 증착방법김용태; 심현상; 이창우; 김성일

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