Browsing byAuthor이석형

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Showing results 1 to 2 of 2

Issue DateTitleAuthor(s)
-Effects PECVD W-N diffusion barrier on thermal stress and electrical properties of Cu/W-N/SiOF multilevel interconnectKim Yong Tae; 김동준; 이석형; PARK YOUNG KYUN; 김익수; 박종완
-Reliability of Cu/W-N thin films deposited on low dielectric constant SiO:F ILD이석형; 김동준; 양성훈; 박정원; 손세일; 오경희; Kim Yong Tae; 박종완

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