Browsing byAuthorXiao, Yu Bin

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Issue DateTitleAuthor(s)
2010-09Inductively coupled plasma reactive ion etching of titanium thin films using a Cl-2/Ar gasXiao, Yu Bin; Kim, Eun Ho; Kong, Seon Mi; Park, Jae Hyun; Min, Byoung Chul; Chung, Chee Won

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