Browsing by Author 권철순

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Showing results 1 to 6 of 6

Issue DateTitleAuthor(s)
1987-01A study of Au-Ge/Ag/Au ohmic contact on n-type (100) GaAs epi-wafer.강광남; 권철순; 최인훈, et al
1994-01Comparison of amorphous and polycrystalline tungsten nitride diffusion barrier for MOCVD-Cu metallization.김용태; 권철순; 김동준, et al
1998-03Effects of nitrogen ion implantation on the thermal stability of tungsten thin films김용태; 권철순; 김동준, et al
1994-06Thermal stability of plasma deposited tungsten nitride thin films for VLSI devices.김용태; 이창우; 권철순
1994-01구리확산 방지막으로서 TiW/WNx 이중층의 열적안정성에 관한 연구김용태; 김동준; 박종완, et al
1995-01질소이온 주입된 질화텅스텐박막의 구리배선용 확산방지막 특성 .김용태; 권철순; 김동준, et al