Browsing by Author 남철우

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Showing results 1 to 2 of 2

Issue DateTitleAuthor(s)
1990-01PECVD 비정질 실리콘박막의 증착공정에 대한 이론적모델 및 실험결과 .김용태; 김진흥; 남철우, et al
1992-01The effect of diluent gas and rapid thermal annealing on the properties of plasma deposited silicon nitride films.김용태; 민석기; 남철우, et al

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