Browsing by Author 성하민

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Showing results 1 to 18 of 18

Issue DateTitleAuthor(s)
2011-01Absorption spectroscopy in IR and Terahertz regions using simultaneous supercontinuum and terahertz emitting source김재헌; 류형숙; 이지석, et al
2015-08Actinic EUV Mask Inspection using Coherent EUV Source based on High-order Harmonic Generation김용수; 박준; 박한용, et al
2015-04CD Measurements of EUV Mask using a Coherent Scattering Microscope Mask Inspection Tool김용수; 박준; 성하민, et al
2015-04Characteristic Analysis of Coherent EUV Light Source based on High-order Harmonic Generation김용수; 박준; 김영희, et al
2015-08Characteristics of the Coherent EUV Light Source for EUV Metrology김용수; 김영희; 박준, et al
2013-06Coherent EUV Light Source by High Harmonic Generation for EUV Metrology성하민; 김용수; 조운조, et al
2015-12Coherent EUV Light Source using a Gas Capillary based on High-order Harmonic Generation박한용; 김용수; 성하민, et al
2013-04Design and Construction of an EUV Grating Spectrometer for the High Harmonic Generation at 13.5 nm김점술; 함용희; 정재룡, et al
2009-05Design and Fabrication of a Dichroic Filter for Fiber Lasers Using Ta2O5/SiO2 thin films오승호; 성하민; 전영민, et al
2012-06Design and Fabrication of Reflection-type Pump LD Protection Filters for High Power Fiber Lasers by Using Ta2O5/SiO2 Thin Films성하민; 김재헌; 이석, et al
2013-04Design of EUV Mirror Using ZrN/Si Thin Films김용수; 성하민; 김용진, et al
2014-02Development of a Coherent EUV Light Source for EUV Mask Inspection김용수; 안준모; 성하민, et al
2013-04Development of Coherent EUV Light Source for EUV Metrology성하민; 김용수; 조운조, et al
2014-04Development of Coherent Scattering Microscopy Mask Inspection System using a Coherent EUV Light Source전영민; 김용수; 안준모, et al
2012-07Investigations on Pulse Stretchers for Chirped Pulse Amplification System성하민; 황정민; 김재헌, et al
2014-04Output Characteristics of a Coherent EUV Light Source for EUV Mask Inspection전영민; 김용수; 안준모, et al
2013-02-18다층 박막 구조를 갖는 미러김선호; 김용태; 김재헌, et al
2016-04차세대 EUV 반도체 포토마스크 검사를 위한 CSM(Coherent Scattering Microscope) 시스템 개발김용태; 전영민; 박한용, et al

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