Browsing by Author 송재훈

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Showing results 1 to 25 of 25

Issue DateTitleAuthor(s)
2001-12A gas cluster ion beam accelerator송재훈; 최덕균; 최원국
1999-11A self-ion assisted beam (SIAB) source based upon Unvala electron beam scheme최원국; 송재훈; 김기한, et al
2003-02Application of nano-cluster ion beam to surface smoothening, etching, and ultra-shallow junction formation.송재훈; 최원국
2001-09Assessment of an ionized Co ₂ gas cluster accelerator.송재훈; 권순남; 최덕균, et al
2002-11Dependence of surface smoothing, sputtering and etching phenomena on cluster ion dosage송재훈; 최덕균; 최원국
1999-05Design of self-ion assisted beam source (SIAB) based on electron focusing with concentric symmetrical electric field and Cu thin film growth by SIAB송재훈; 김기환; 이충만, et al
2000-11Effect of ultra-thin catalyst deposited upon In2O3 thin film on CO sensitivity이혜정; 송재훈; 권순남, et al
2001-10Enhancement of CO sensitivity of indium oxide-based semiconductor gas sensor through ultra-thin cobalt adsorption이혜정; 송재훈; 윤영수, et al
2001-10Enhancement of photoluminescence and electrical properties of Ga-doped ZnO thin film grown on α -Al ₂ O ₃ (0001) single-crystal subastrate by rf magnetron sputtering through rapid thermal annealin조정; 나종범; 오민석, et al
2000-09Epitaxial growth of La-Ca-Mn-O thin film on out-of-plane twinned LaAIO₃송재훈; K. K. Kim; 오영제, et al
2003-06Formation and characterizations of ultra-shallow p+-n junctions using B10H14 ion implantation전기영; 김지수; 황정남, et al
2002-07Gas cluster ion source for etching and smoothing of solid surfaces.송재훈; 최덕균; 최원국
2002-11Indium tin oxide surface smoothing by gas cluster ion beam송재훈; 최덕균; 최원국
1999-01Influence of crystallinity and oxygen content of ZnO thin film deposited by RF magnetron sputtering on photoluminescence.송재훈; 김경국; 정형진, et al
2002-05Isolated cluster ion impact on solid surfaces HOPG, Si and Cu(TiO ₂ )/Si surfaces송재훈; 최원국
1999-05(La,Ca)MnO3/LaAlO3 (100) 박막의 결정성장 분석송재훈; 송종한; 최덕균, et al
2000-08La-Ca-Mn-O thin film based thermistor for measuring low temperature of 77-230 K송재훈; 김경국; 정형진, et al
2000-11Photoluminescence and heteroepitaxy of ZnO on aspphire substrate (0001) grown by rf magnetron sputtering김경국; 송재훈; 정형진, et al
2003-10Surface smoothing and etching by gas cluster ion beam송재훈; 최원국
1999-01The effect of initial Pd catalyst oxidation state on CH4 sensitivity of SnO2 thin film sensor최원국; 조정; 조준식, et al
2000-04The grain size effects on the photoluminescence of ZnO/α-AI2O3 grown by Radio-Frequency magnetron sputtering김경국; 송재훈; 정형진, et al
2001-02Twinned LaAlO₃ substrate effect on epitaxially grown La-Ca-Mn-O thin film crystalline structure송재훈; 김경국; 오영제, et al
2001-01-20가스 클러스터 이온 가속기를 이용한 나노 구조물 형성 방법권순남; 송재훈; 송종한, et al
2001-10-25가스 클러스터 이온빔을 이용한 아이.티.오 박막 표면처리시스템 및 그 방법송재훈; 오희범; 윤덕주, et al
2000-01-27저온 측온 저항계용 박막 및 그의 제조방법송재훈; 오영제; 윤영수, et al

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