Browsing by Author 안창규

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Showing results 1 to 6 of 6

Issue DateTitleAuthor(s)
2001-07Deposition of aluminum nitride thin film by MOCVD using AlCl₃ : BuNH₂ single source precursor한성환; 안창규; 최승철
2000-03MOCVD deposition of AlN thin film for packaging materials안창규; 최승철; 조성훈, et al
2002-12MOCVD of aluminum nitride thin films with a new type of single-source precursor: AlCl₃:tBuNH₂주오심; 정광덕; 조성훈, et al
2001-08Preparation of AIN thin film with new type of single precursor안창규; 최승철; 한성환
2000-05Single precursor MOCVD of AlN thin films & the stoichiometry controlling안창규; 경제홍; 조성훈, et al
2000-05The synthesis of a suitable single precursor for AIN thin films한성환; 안창규; 경제홍, et al