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Showing results 1 to 3 of 3

Issue DateTitleAuthor(s)
2003-07Effect of Cl/H input ratio on the growth rate of MoSi₂ coatings formed by chemical vapor deposition of Si on Mo substrates from SiCl₄H₂ precursor gases윤진국; 김긍호; 변지영, et al
1998-09Effects of Cl/H input ratio on the chemical vapor deposition rate of silicon on molybdenum substrate윤진국; 윤호상; 김희수, et al
2003-05Formation process and microstructural evolution of Ni-silicide layers grown by chemical vapor deposition of Si on Ni substrate윤진국; 변지영; 김긍호, et al

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