Browsing by Author 이석형

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Showing results 1 to 3 of 3

Issue DateTitleAuthor(s)
1999-01Effects PECVD W-N diffusion barrier on thermal stress and electrical properties of Cu/W-N/SiOF multilevel interconnect김용태; 김동준; 이석형, et al
1998-04Reliability of Cu/W-N thin films deposited on low dielectric constant SiO:F ILD이석형; 김동준; 양성훈, et al
1999-01Thermal stability enhancement of Cu/WN/SiOF/Si multilayers by post-plasma treatment of fluorine-doped silicon dioxide이석형; 김동준; 양성훈, et al

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