Browsing by Author 이승범

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Showing results 1 to 7 of 7

Issue DateTitleAuthor(s)
2015-08Actinic EUV Mask Inspection using Coherent EUV Source based on High-order Harmonic Generation김용수; 박준; 박한용, et al
2015-04CD Measurements of EUV Mask using a Coherent Scattering Microscope Mask Inspection Tool김용수; 박준; 성하민, et al
2015-04Characteristic Analysis of Coherent EUV Light Source based on High-order Harmonic Generation김용수; 박준; 김영희, et al
2014-04Development of Coherent Scattering Microscopy Mask Inspection System using a Coherent EUV Light Source전영민; 김용수; 안준모, et al
2012-07The Effect of Tin-Support Interaction on Catalytic Stability over Pt-Sn/xAl-SBA-15 Catalysts for Propane DehydrogenationBao Khanh Vu; 신은우; 안인영, et al
2012-11The roles of CeyZr1-yO2 in propane dehydrogenation: Enhancing catalytic stability and decreasing coke combustion temperatureBao Khanh Vu; 신은우; 하정명, et al
2016-04차세대 EUV 반도체 포토마스크 검사를 위한 CSM(Coherent Scattering Microscope) 시스템 개발김용태; 전영민; 박한용, et al