Browsing by Author 이시형

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Showing results 1 to 30 of 33

Issue DateTitleAuthor(s)
2002-06(200)-predominant growth of radio-frequency sputtered SrBi//2Ta//2O//9 thin films이시형; 이전국; 윤기현
2000-04A new type thin film bulk acoustic resonator(TFR) using surface micromachining technique김현호; 이시형; 주병권, et al
2001-04A noble suspended type thin film resonator (STFR) using the SOI technology김현호; 주병권; 이윤희, et al
2001-12Acoustic characterization of ALN films using a high overtone bulk acoustic wave resonator이시형; 김주형; 이전국, et al
2002-01AIN piezoelectric materials for wireless communication thin film components김주형; 이시형; 안진호, et al
2000-11AIN 압전체를 이용한 suspended 압전박막공진기의 제조주병권; 김현호; 이시형, et al
2000-12AlN-Si Thin Film Bulk Acoustic Over-moded Resonator이시형; 이전국; 김상희, et al
2000-11Asymmetric pulsed dc sputtered AIN thin film for FBAR application김주형; 이시형; 이전국, et al
2001-01Design and fabrication of thin-film bulk acoustic resonator김인태; 김희영; 이시형, et al
2001-07Dry etching of SrBi2Ta2O9 thin films in Cl2NF3O2Ar inductively coupled plasmasY.H. Im; J.S. Park; C.S. Choi, et al
1998-01Effect of Sr content on the oriented growth of SrBi2Ta2O9 thin films배철휘; 이전국; 이시형, et al
1999-09Ex situ growth of the c-axis preferred oriented SrBi2Ta2O9 thin films on Pt/Ti/SiO2/Si substrates배철휘; 이전국; 이시형, et al
2001-06Fabrication and characterization of suspended-type thin film resonator using SOI-micromachining process주병권; 김현호; 이시형, et al
2004-02Fabrication of suspended thin film resonator for application of RF bandpass filter김현호; 주병권; 이윤희, et al
2002-07Film bulk acoustic wave resonator using surface micromachining.김인태; 박윤권; 이시형, et al
2003-01Growth of highly c-axis textured AlN films on Mo electrodes for film bulk acoustic wave resonators.이시형; 이전국; 윤기현
2002-08High frequency response of bragg reflector type film bulk acoustic wave resonator김주형; 이시형; 안진호, et al
2002-10Influence of electrode configurations on the quality factor and piezoelectric coupling constant of solidly mounted bulk acoustic wave resonators.이시형; 윤기현; 이전국
2002-06Influence of electrodes and bragg reflector on the quality of thin film bulk acoustic wave resonators이시형; 김주형; G. D. Mansfeld, et al
1999-12Influence of the seed layer on the crystallization of in-situ sputtered SrBi2Ta2O9 films이시형; 이전국; 정형진, et al
2003-03Microstructure control of tungsten film for bragg reflectors of thin film bulk acoustic wave resonators.강성철; 이시형; 박종완, et al
2002-04Monolithic film bulk acoustic wave resonator using SOI wafer김인태; 박윤권; 이시형, et al
2002-12Monolithic film bulk acoustic wave resonator using SOI wafer김인태; 박윤권; 이시형, et al
2001-10Numerical analysis of bragg reflector type film bulk acoustic wave resonator김주형; 이시형; 안진호, et al
2000-06Orientation control of SrBi2Ta2O9 thin films on Pt (111) substrates이시형; 이전국; 배철휘, et al
2001-12Plsma chemistries for dry etching of SrBi ₂ Ta ₂ O//9 thin filmsJ. S. Park; Y. H. Im; R. J. Cho, et al
2003-03Relationship between residual stress and structural properties of AlN films deposited by r.f. reactive sputtering이시형; 윤기현; 정덕수, et al
1998-01Role of abnormal grain growth on the ferroelectric properties of SrBi2Ta2O9 thin films fabricated by R.F. magnetron sputtering배철휘; 이전국; 이시형, et al
2003-04Role of AlN piezoelectric crystal orientation in solidly mounted film bulk acoustic wave resonators이시형; 강성철; 한상철, et al
2002-04SOI 웨이퍼를 이용한 압전박막 공진기의 설계 및 제작김인태; 박윤권; 이시형, et al