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Showing results 1 to 12 of 12

Issue DateTitleAuthor(s)
2002-10Development of ceria-based slurry with high selectivity for STI CMP임건자; 김태은; 김주선, et al
2002-08Diluted synthesis of nanocrystalline CeO₂ by mechanical milliing임건자; 김태은; 이종호, et al
2000-12Dry compaction of nanosize TiO₂ powders이해원; 임건자; 전형우, et al
2003-01Effect of glycine adsorption on polishing of silicon nitride in chemical mechanical planarzation process김태은; 임건자; 이종호, et al
2004-10Effects of oxidants on the removal of tungsten in CMP process임건자; 이종호; 김주선, et al
2003-02Effects of synthetic temperature and suspension stability of CeO₂abrasive on CMP characteristics임건자; 김태은; 이종호, et al
2004-05Mechanochemical Synthesis of Nano-sized CeO2 and Its Application for CMP Slurry임건자; 이종호; 김주선, et al
2006-05Oxidation Behavior of Tungsten in H2O2- and Fe(NO3)3-Base Aqueous Slurries임건자; 이종호; 손지원, et al
2001-06구조 세라믹스의 분말 성형 공정이해원; 송휴섭; 김주선, et al
2002-01-24텅스텐 씨엠피용 슬러리김상우; 김주선; 김태은, et al
2002-05-03화학적 기계적 평탄화 공정의 실시간 전기화학적 분석 장치김주선; 김태은; 이종호, et al
2003-05-16STI-CMP용 고성능 슬러리김주선; 김태은; 이종호, et al