Browsing by Author 허재성

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Showing results 1 to 9 of 9

Issue DateTitleAuthor(s)
2003-11Deposition of Iridium Oxide Thin Films as Bottom Electrodes of Ferroelectric Capacitors허재성; 최훈상; 이종한, et al
2001-12Electrical properties of Pt/SrBi2Ta2O9/Ta2O5/Si ferroelectric gate structure최훈상; 박군상; 허재성, et al
2004-03Measuring the Young's modulus of microstructure using parallel plate electrostatic microactuator김태엽; 허재성; 문성욱, et al
2002-11Optical MEMS-MEMS 기술의 액츄에이터 응용 (III)문성욱; 허재성
2004-03Variable optical attenuator using parallel plate electrostatic actuator허재성; 김태엽; 최인훈, et al
2004-11Variable Optical Attenuator Using Parallel Plate Electrostatic Actuator허재성; 김태엽; 신현준, et al
2004-04Variable optical attenuator using parallel plate electrostatic actuator김태엽; 허재성; 문성욱, et al
2003-07VOA fabrication with symmetric actuator김태엽; 허재성; 문성욱, et al
2003-05V₂O5/V/V₂O5 based uncooled infrared detector by MEMS technology한용희; 허재성; 최인훈, et al

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