Browsing by Author 황영현

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Showing results 1 to 4 of 4

Issue DateTitleAuthor(s)
2012-05A new atomic layer deposition method and electrical performance of WN diffusion barrier for Cu nano via contact structures김영환; 황영현; 조원주, et al
2012-06Comparison of thin film properties of WN diffusion barrier prepared by atomic layer deposition using metal organic and metal halide reactant gases황영현; 조원주; 김용태
2013-10Investigation of tungsten nitride deposition using tungsten hexafluoride precursor for via and plug metallization황영현; 조원조; 김용태
2011-10Thermal stability of Cu/WN/Si nano via contact structures황영현; 조원주; 김영환, et al