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Showing results 1 to 3 of 3

Issue DateTitleAuthor(s)
2014-07An integrated Mach-Zehnder interferometric biosensor with a silicon oxynitride waveguide by plasma-enhanced chemical vapor depositionChoo, Sung Joong; Kim, Jinsik; Lee, Kyung Woon; Lee, Dong Ho; Shin, Hyun-Joon; Park, Jung Ho
2012-03An Integrated Mach-Zehnder Interferometric Sensor Fabricated by Using Cr Mask Extension LithographyChoo, Sung Joong; Park, Jung Ho; Lee, Sangyoup; Shin, Hyun-Joon
2009-09Optimization of silicon oxynitrides by plasma-enhanced chemical vapor deposition for an interferometric biosensorChoo, Sung Joong; Lee, Byung-Chul; Lee, Sang-Myung; Park, Jung Ho; Shin, Hyun-Joon
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