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Showing results 1 to 4 of 4

Issue DateTitleAuthor(s)
2012-10-30High density plasma reactive ion etching of CoFeB magnetic thin films using a CH4/Ar plasmaKim, Eun Ho; Lee, Tea Young; Min, Byoung Chul; Chung, Chee Won
2015-09Inductively coupled plasma reactive ion etching of CoFeB magnetic thin films in a CH3COOH/Ar gas mixtureGaray, Adrian Adalberto; Hwang, Su Min; Choi, Ji Hyun; Min, Byoung Chul; Chung, Chee Won
2010-09Inductively coupled plasma reactive ion etching of titanium thin films using a Cl-2/Ar gasXiao, Yu Bin; Kim, Eun Ho; Kong, Seon Mi; Park, Jae Hyun; Min, Byoung Chul; Chung, Chee Won
2006-09Nanometer-sized etching of magnetic tunnel junction stack for magnetic random access memoryPark, Ik Hyun; Min, Su Ryun; Park, Wang Hyun; Shin, Kyung Ho; Chung, Chee Won
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