Browsing by Author J. H. Jo

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Showing results 1 to 3 of 3

Issue DateTitleAuthor(s)
1990-01Growth and characterization of silicon nitride films by PECVD.강광남; 이정일; J. H. Jo, et al
1991-01Growth and characterization of silicon-nitride films by plasma-enhanced chemical vapor deposition강광남; 이정일; J. H. Jo, et al
1991-01Heating effect in plasma-enhanced chemical vapor deposition of silicon-nitride.강광남; 이정일; J. H. Jo, et al