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Showing results 1 to 11 of 11

Issue DateTitleAuthor(s)
-Actinic EUV Mask Inspection using Coherent EUV Source based on High-order Harmonic GenerationKim Yong Soo; Park June; Park Han Young; Hamin Sung; Jomsool Kim; Seung Beom Lee; Hyun Woo Cho; Ju Han Lee; Park, Min-Chul; Jhon, Young Min
-CD Measurements of EUV Mask using a Coherent Scattering Microscope Mask Inspection ToolKim Yong Soo; Park June; 성하민; 김점술; 이승범; 조현우; Park, Min-Chul; Cho, Woon Jo; Kim, Yong Tae; 이주한; Jhon, Young Min
-Characteristic Analysis of Coherent EUV Light Source based on High-order Harmonic GenerationKim Yong Soo; Park June; Kim Younghee; 성하민; 김점술; 이승범; 조현우; Cho, Woon Jo; Kim, Yong Tae; 이주한; Jhon, Young Min
-Characteristics of the Coherent EUV Light Source for EUV MetrologyKim Yong Soo; Kim Younghee; Park June; Hamin Sung; Jomsool Kim; Ju Han Lee; Jhon, Young Min
-Coherent EUV Light Source using a Gas Capillary based on High-order Harmonic GenerationPark Han Young; Kim Yong Soo; 성하민; 김점술; 이주한; Jhon, Young Min
-Design and Construction of an EUV Grating Spectrometer for the High Harmonic Generation at 13.5 nm김점술; 함용희; 정재룡; 권승호; Sung Hamin; Kim Yong Soo; Jhon, Young Min
-Design of EUV Mirror Using ZrN/Si Thin FilmsKim Yong Soo; Sung Hamin; Kim Young Jin; Cho, Woon Jo; 이주한; Kim, Yong Tae; Jhon, Young Min
-Development of a Coherent EUV Light Source for EUV Mask InspectionKim Yong Soo; Ahn Joonmo; 성하민; Cho, Woon Jo; Park, Min-Chul; 김점술; KIM, JAE HUN; Woo, Deok Ha; Lee, Seok; Ju Han LEE; Kim, Yong Tae; Jhon, Young Min
-Development of Coherent EUV Light Source for EUV MetrologySung Hamin; Kim Yong Soo; Cho, Woon Jo; Park, Min-Chul; 함용희; 김점술; KIM, JAE HUN; Woo, Deok Ha; Lee, Seok; 이주한; Kim, Yong Tae; Jhon, Young Min
-Development of Coherent Scattering Microscopy Mask Inspection System using a Coherent EUV Light SourceJhon, Young Min; Kim Yong Soo; Ahn Joonmo; Lee, Ju han; Sung, Hamin; Kim, Jomsool; 이승범; 조현우; Park, Min-Chul; Cho, Woon Jo; Kim, Yong Tae
-Output Characteristics of a Coherent EUV Light Source for EUV Mask InspectionJhon, Young Min; Kim Yong Soo; Ahn Joonmo; Sung, Hamin; Cho, Woon Jo; Park, Min-Chul; Kim, Jomsool; Lee, Ju Han; KIM, JAE HUN; MINAH SEO; Lee, Seok; Kim, Yong Tae
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