Showing results 1 to 3 of 3
Issue Date | Title | Author(s) |
---|---|---|
1997-04 | Nitridation of Al2O3 and GaAs surfaces by control enhanced ECR plasma | Mutoh, H; OKeeffe, P; Den, S; Komuro, S; Morikawa, T; Park, YJ; Hara, K; Munekata, H; Kukimoto, H |
1997-03-01 | Oxygen atomic flux O-* enhancement by gas-pulsed electron cyclotron resonance plasma | Park, YJ; OKeeffe, P; Ozasa, K; Mutoh, H; Aoyagi, Y; Min, SK |
1997-06 | Study of defects generated from a nitridation of GaAs surface | Park, YJ; Kim, EK; Han, IK; Min, SK; OKeeffe, P; Mutoh, H; Munekata, H; Kukimoto, H |