Browsing by Author Woongkyu Lee

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Showing results 1 to 8 of 8

Issue DateTitleAuthor(s)
2013-03Atomic Layer Deposition of SrTiO3 Films with Cyclopentadienyl-Based Precursors for Metal-Insulator-Metal CapacitorsWoongkyu Lee; Jeong Hwan Han; Woojin Jeon, et al
2014-12Chemistry of active oxygen in RuOx and its influence on the atomic layer deposition of TiO2 filmsWoojin Jeon; Woongkyu Lee; Yeon Woo Yoo, et al
2021-02Comparison of high-k Y2O3/TiO2 bilayer and Y-doped TiO2 thin films on Ge substrate김혜령; Dong Gun Kim; Dae Seon Kwon, et al
2014-04Controlling the Al-Doping Profile and Accompanying Electrical Properties of Rutile-Phased TiO2 Thin FilmsWoojin Jeon; Sang Ho Rha; Woongkyu Lee, et al
2014-12Evaluating the Top Electrode Material for Achieving an Equivalent Oxide Thickness Smaller than 0.4 nm from an Al-Doped TiO2 FilmWoojin Jeon; Sijung Yoo; Hyo Kyeom Kim, et al
2013-12Influences of metal, non-metal precursors, and substrates on atomic layer deposition processes for the growth of selected functional electronic materialsSang Woon Lee; Byung Joon Choi; Taeyong Eom, et al
2018-12MoO2 as a thermally stable oxide electrode for dynamic random-access memory capacitors김성근; 조철진; 이우철, et al
2014-12Structure and Electrical Properties of Al-Doped HfO2 and ZrO2 Films Grown via Atomic Layer Deposition on Mo ElectrodesYeon Woo Yoo; Woojin Jeon; Woongkyu Lee, et al

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