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Browsing byAuthorYong Soo Kim

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Showing results 1 to 2 of 2

Issue DateTitleAuthor(s)
-Actinic EUV Mask Inspection using Coherent EUV Light from High Harmonic GenerationMOON BYUNGHYUCK; Yong Soo Kim; Kim, Yong Tae; Hamin Sung; Jomsool Kim; Byeong-Kwon Ju; Jhon, Young Min
-Optimization of High Harmonic Generation of Coherent EUV Light for EUV Metrology: Simulations and ExperimentsJung Min Ki; Yong Soo Kim; Kim Younghee; Kim, Yong Tae; Hamin Sung; Jomsool Kim; Ju Han Lee; Jhon, Young Min
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