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Issue DateTitleAuthor(s)
2020-08Influence of high energy ion irradiation on structural, morphological and optical properties of high-k dielectric hafnium oxide (HfO2) thin films grown by atomic layer depositionKumar, Rajesh; Chauhan, Vishnu; Koratkar, N.; Kumar, Shalendra; Sharma, Aditya; Chae, K.-H.; Won, S.O.
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