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Issue DateTitleAuthor(s)
1999-01-01Thermal stability enhancement of Cu/WN/SiOF/Si multilayers by post-plasma treatment of fluorine-doped silicon dioxideLee, S; Kim, DJ; Yang, SH; Park, J; Sohn, S; Oh, K; Kim, YT; Kim, JY; Yeom, GY; Park, JW
1

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