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Showing results 1 to 4 of 4

Issue DateTitleAuthor(s)
-Actinic EUV Mask Inspection using Coherent EUV Source based on High-order Harmonic GenerationKim Yong Soo; Park June; Park Han Young; Hamin Sung; Jomsool Kim; Seung Beom Lee; Hyun Woo Cho; Ju Han Lee; Park, Min-Chul; Jhon, Young Min
-Characteristic Analysis of Coherent EUV Light Source based on High-order Harmonic GenerationKim Yong Soo; Park June; Kim Younghee; 성하민; 김점술; 이승범; 조현우; Cho, Woon Jo; Kim, Yong Tae; 이주한; Jhon, Young Min
-Characteristics of the Coherent EUV Light Source for EUV MetrologyKim Yong Soo; Kim Younghee; Park June; Hamin Sung; Jomsool Kim; Ju Han Lee; Jhon, Young Min
-Development of a Coherent EUV Light Source for EUV Mask InspectionKim Yong Soo; Ahn Joonmo; 성하민; Cho, Woon Jo; Park, Min-Chul; 김점술; KIM, JAE HUN; Woo, Deok Ha; Lee, Seok; Ju Han LEE; Kim, Yong Tae; Jhon, Young Min
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