Showing results 1 to 3 of 3
Issue Date | Title | Author(s) |
---|---|---|
2001-07 | Dry etching of SrBi2Ta2O9 thin films in Cl-2/NF3/O-2/Ar inductively coupled plasmas | Im, YH; Park, JS; Choi, CS; Choi, RJ; Hahn, YB; Lee, SH; Lee, JK |
2000-03 | Low-temperature growth of GaN by atomic nitrogen based on a dielectric barrier discharge | Kim, J; Byun, D; Kim, JS; Kum, DW |
2001-02 | Plasma chemistries for dry etching of SrBi2Ta2O9 thin films | Park, JS; Im, YH; Choi, RJ; Hahn, YB; Choi, CS; Lee, SH; Lee, JK |