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Showing results 1 to 2 of 2

Issue DateTitleAuthor(s)
2007-12-03Characteristics of low-k SiOC(-H) films deposited at various substrate temperature by PECVD using DMDMS/O-2 precursorKim, Chang Young; Kim, Seung Hyun; Navarnathavan, R.; Choi, Chi Kyu; Jeung, Won Young
2011-09UV irradiation effects on the bonding structure and electrical properties of ultra low-k SiOC(-H) thin films for 45 nm technology nodeChoi, Chi Kyu; Kim, Chang Young; Navamathavan, R.; Lee, Heang Seuk; Woo, Jong-Kwan; Hyun, Myung Taek; Lee, Heon Ju; Jeung, Won Young
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