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Showing results 1 to 2 of 2

Issue DateTitleAuthor(s)
2001-02-02Measurement of sheath expansion in plasma source ion implantationKim, YW; Kim, GH; Han, S; Lee, Y; Cho, J; Rhee, SY
2001-02-02The measurement of nitrogen ion species ratio in inductively coupled plasma source ion implantationCho, J; Han, S; Lee, Y; Kim, OK; Kim, GH; Kim, YW; Lim, H; Suh, M
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