Browsing bySubjectThrough-silicon via (TSV)

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Issue DateTitleAuthor(s)
2012-04Microstructure Evolution and Defect Formation in Cu Through-Silicon Vias (TSVs) During Thermal AnnealingShin, Hae-A-Seul; Kim, Byoung-Joon; Kim, Ju-Heon; Hwang, Sung-Hwan; Budiman, Arief Suriadi; Son, Ho-Young; Byun, Kwang-Yoo; Tamura, Nobumichi; Kunz, Martin; Kim, Dong-Ik; Joo, Young-Chang

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