Browsing by Subject W-B-N

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Showing results 1 to 3 of 3

Issue DateTitleAuthor(s)
1997-04Characteristics of tungsten boron nitride thin film by plasma enhanced chemical vapor deposition김동준; 김용태; 박종완
2000-05Effect of NH3 plasma treatment on improvement of reliability of W-B-N/HSQ thin films김동준; 심현상; 김용태, et al
2000-09Thermal stability of tungsten-boron-nitride thin film as diffusion barrier박영균; 김성일; 김용태, et al