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Showing results 1 to 2 of 2

Issue DateTitleAuthor(s)
2002-11Dependence of surface smoothing, sputtering and etching phenomena on cluster ion dosageSong, JH; Choi, DK; Choi, WK
-Gas cluster ion source for etching and smoothing of solid surfaces.송재훈; CHOI DUCK KYUN; CHOI WON-KOOK
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