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Showing results 1 to 3 of 3

Issue DateTitleAuthor(s)
-Characterization of fluorocarbon fhin films deposited by ICP and PPLee Ji-hye; K. Kim; LEE, YEON HEE
2004-08-02Plasma source ion implantation using high-power pulsed RF plasmaHan, S; Lee, Y; Kim, YW; Kim, Y; Chun, H; Lee, J
2004-08-02Time-resolved plasma measurement in a high-power pulsed ICP source for large areaKim, YW; Jung, YD; Han, S; Lee, Y; Kim, GH
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