Browsing bySubjectN-(tert-butyldimethylsilyloxy)maleimide

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Issue DateTitleAuthor(s)
1997-12-26Polymerization of N-(tert-butyldimethylsilyloxy)maleimide and applications of the polymers as resist materialsKim, ST; Kim, JB; Chung, CM; Ahn, KD

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