Actinic EUV Mask Inspection using Coherent EUV Light from High Harmonic Generation

Title
Actinic EUV Mask Inspection using Coherent EUV Light from High Harmonic Generation
Authors
김용태전영민문병혁Yong Soo KimHamin SungJomsool KimByeong-Kwon Ju
Keywords
EUV; High Harmonic Generation; Mask Inspection
Issue Date
2016-11
Publisher
International Microprocesses and Nanotechnology Conference 2016
Citation
VOL 11P-11-1
URI
http://pubs.kist.re.kr/handle/123456789/64676
Appears in Collections:
KIST Publication > Conference Paper
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